| 摘要 |
PURPOSE:To prevent the damage of the surface of a rotating drum and the stripping of a deposit without using a carrier when vapor is deposited on a porous substrate while moving the substrate along the surface of the drum, by coating the surface of the drum with a porous layer. CONSTITUTION:The surface of a rotating drum 6 is coated with a porous surface layer 12. In a vacuum chamber, a porous substrate such as paper 8 is fed from a paper feeder 2, vapor of a metal or the like evaporated from an evaporating source 7 under the drum 6 is deposited on the paper 8 while moving the paper 8 along the drum 6, and the paper 8 is wound around a paper discharger 3. It is desirable that the layer 12 has rigidity and heat resistance, and glass cloth, metallic mesh or the like is used as the material of the layer 12. |
