| 摘要 |
PURPOSE:To eliminate the displacement of the position of a cassette and the influence of a thermal deformation by providing separating means for moving the cassette conveyed to a stage toward a predetermined position, placing a material to be processed on the way on the reference surface of the stage to separate it from a holder. CONSTITUTION:A cassette 20 which contains a reticle 29 is conveyed to contact stoppers 25, 25 to stop, the reticle 29 is pressed by the deflection of a pressing spring 32 to contact positioning members 26, 26 to be positioned. When conveying means is moved backward after a cassette 19 and the reticle 29 are positioned on a stage 1, the spring 32 is returned to separate from the reticle 29, cylinders 7, 7 are operated, levers 5, 6 move down the cassette 9 and the reticle 29 to place the reticle 29 on a vacuum chuck 23, further moves down the cassette 19 to separate the reticle 29 from the holding grooves 30, 30 of the cassette 19 to that both become noncontacting state. Thus, the material can be held at a predetermined position without influence of the positional displacement and the thermal deformation of the cassette. |
