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发明名称
摘要
申请公布号
JPS5920979(B2)
申请公布日期
1984.05.16
申请号
JP19760089246
申请日期
1976.07.28
申请人
FUSESOYUZUNII NAUCHINO ISUREDOATERUSUKII INST HORATSURABOTOKE NERATSURUSHAYUSHIKU METODOFU I SUREDOSUTO KONTORORUYA KACHESUTOA MATERIAROFU
发明人
URADEIMIIRU TEIMOFUEEUITSUCHI BOBUROFU;YURI AURAAMOITSUCHI DORUZAEFU;NERI AREKUSANDORONA REBEDEUA
分类号
G01N29/04;G01N27/90;G01N29/24;H01L41/00;H03H3/08;H03H9/25;H03H9/30
主分类号
G01N29/04
代理机构
代理人
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