| 摘要 |
PURPOSE:To improve the durability of a lubricating film by forming a thin film A of oxide, nitride or the like on the surface of the magnetic film of a magnetic disk, further forming a thin metallic or alloy film on the film A, making the film A finely uneven by a specified method, and coating the uneven part with a lubricant. CONSTITUTION:A thin film 2 of SiO2, Si3N4 or the like is formed by sputtering on a disk medium obtd. by forming a magnetic film 1 on a substrate. A thin film 3 of a metal such as Al, In, Li, Pb, Tl, Sn, Ag, Ni or Co or an alloy is formed on the film 2 after heating the substrate to about 300 deg.C, or the film 3 is formed and recrystallized by heating to form grain bundary planes 4. The substrate is plasma-etched with gaseous CCl4 to recess the film 3 along the planes 4. While the projections of the film 3 remain, the etching gas is changed over from gaseous CCl4 to CF4, and the film 2 is recessed by etching using the remaining film 3 as a mask. The etching gas is then changed over to gaseous CCl4, and after removing the film 3, the resulting uneven surface of the film 2 is coated with a lubricant 5. Thus, a disk having a prolonged lubricating life and superior CSS resistance is obtd. |
