| 摘要 |
PURPOSE:To obtain titled element which has a fast optical response speed and good characteristic reproducibility and is manufactured easily by making a photoconductor layer of a specific amorphous silicon film, and forming a light shielding film of a specific amorphous silicon film which contains fluorine and hydrogen. CONSTITUTION:A transparent conductive film 15, a photoconductor film 16, a light shielding film 17, and a dielectric multi-layered reflecting film 18 are laminated on the 1st glass base board 14 and liquid crystal 20 is sealed between the 1st glass base board and the 2nd glass base board 23 with the 2nd transparent conductive film 22 to constitute an optical writing type liquid crystal light bulb element. The photoconductor film 16 is made of an a-Si:H film which is formed by glow discharge at 300 deg.C base board temperature under 0.3Torr pressure while using SiH4 as raw material gas and has <=10<-7>OMEGA<-1>cm<-1> dark conductivity and about 10<-4>OMEGA<-1>cm<-1> bright conductivity and the light shielding film 17 is made of an a-Si:F:H film formed successively by glow discharge at a 10 gas mixing ratio SiF4/H2 of SiF4 and H2, at 300 deg.C base board temperature, and under 1Torr pressure without leaking a sample from a forming device. |
