| 摘要 |
PURPOSE:To improve the accuracy of a binary coded pattern and to detect a subject pattern with high reliability and high accuracy and at a high speed, by using the threshold value obtained by binary coding the immediately preceding subject pattern to the threshold value for binary coding. CONSTITUTION:A magnified image of a pellet 1 is divided into two partial images by a reflector 11 and converted into analog video signals by photoelectric converters 14-0 and 14-1 respectively. Stages 15-0 and 15-1 control the viewfields of the converters 14-0 and 14-1 in response to the pellet 1. A video processor 17 performs the binary coding of the analog video signal and the detection of pads. In this case, the threshold value obtained by binary coding the pattern of the immediately preceding pellet 1 to the threshold value for binary coding. A computer 21 obtain the positions of all pads, and an automatic wire bonder 25 connects automatically each pad to an external electrode via a metallic line. |
