| 摘要 |
PURPOSE:To prolong the life of a tool by improving resistance against fused deposition and wear by directly forming an aluminium oxide coating layer over the tool surface at temperature lower than that of a specific coating reaction. CONSTITUTION:An aluminum oxide coating layer is directly formed over the tool surface at temperature lower than the coating reaction temperature of 400 deg.C by a chemical vacuum evaporation method. A host material is oxidized at reaction temperature over 400 deg.C, and a decarburized layer is formed between the host material and the coating layer, resulting in the reduction of an adhesive property. Upon performing the chemical vacuum evaporation, at least one kind of diethyl aluminium chloride, triethylaluminium chloride, triethylaluminium, and ethyl aluminium dichloride is used, and a mixture of hydrogen gas and methane gas is used as carrier gas. |
