发明名称 COATING APPARATUS
摘要 A coating apparatus having a housing and a vacuum pump for establishing a vacuum in the housing. First and second rotors are disposed within the housing for rotation about axes which are offset from the horizontal by less than 45 DEG whereby the upper portions of the rotors are in relatively close proximity to each other and the lower portions of the rotors are spaced apart from each other. A source of coating material is disposed between the rotors generally in line with the axis of rotation of the rotors. The rotors have substrate carrying surfaces having longitudinal dimensions extending generally parallel to the axis of rotation which is such so that an imaginary vertical line extending downwardly from the top portion of the substrate carrying surface from the inner extremity of the same clears the outermost margin of the lower portion of the substrate carrying surfaces of the rotor whereby debris and the like falling by force of gravity from the top portion of the rotor will clear the lower portion of the rotor.
申请公布号 DE3067319(D1) 申请公布日期 1984.05.10
申请号 DE19803067319 申请日期 1980.04.30
申请人 OPTICAL COATING LABORATORY, INC. 发明人 SEDDON, RICHARD IAN
分类号 C23C14/24;C23C14/50;C23C14/56;(IPC1-7):C23C13/08 主分类号 C23C14/24
代理机构 代理人
主权项
地址