| 摘要 |
PURPOSE:To make maintenance free and to achieve the enhancement of measuring accuracy, by bringing an always clean conductive fine wire into contact with the measuring place of an object to be measured. CONSTITUTION:The falling of a conductive fine wire delivery element 20 is indicated from MPU6' through buses 28, 29 and the delivery element 20 is fallen in a predetermined amount by an up-and-down mechanism part 24 while a measuring terminal part 2'a is contacted with an object 5 to be measured to measure flitting voltage. When this measurement reaches the termination of measurement repetition on a program, the delivery element 20 is raised to finish measurement. On the other hand, when not termination, continuation is judged to raise the delivery element 20 which is, in turn, rotated in a predetermined amount by a rotary mechanism part 22 and the terminal part 2'a is cleaned by a shaping element 21. In the next step, MPU6' feeds indication to an X-Y-theta table 27 and the object 5 to be measured is moved to the direction set by the program in a predetermined amount to perform the next measuring cycle. |
