LITHOGRAPHIC PROCESS USING A PROCESSING LAYER CONTAINING A CHALCOGENIDE GLASS AND A SURFACE AMOUNT OF SOURCE-METAL CONTAINING MATERIAL

摘要

TAI, K. L. 2 LITHOGRAPHIC PROCESS AND RESULTING ARTICLE Lithographic fabrication of LSI's depends on inorganic resist to yield excellent edge acuity. Systems depend upon photomigration--of, e.g., silver--into a chalcogenide or other glass layer to insolubilize irradiated regions with respect to solvent development. Regulation of silver content and control of processing conditions result in a surface concentration gradient and concomitant lateral diffusion of silver to account for enhanced acuity.