| 摘要 |
PURPOSE:To obtain a cassette device suitable for an electron beam drawing device by containing and holding an electrostatic chuck plate for chucking a sample electrostatically in a main body of the cassette where those are insulated securely and evenness and set position of a sample are held. CONSTITUTION:A main body of a cassette 10 is composed of a cassette outer flame 11 and an annular cassette inner flame 12 which is located inside of said frame 11 and an upper surface of the inner frame 12 is fixed to be held to a reference surface of the outer frame 11 by a spring 13 arranged between the frames 11 and 12. A spring 15 is arranged on one side surface between the inner frame 12 and the outer frame 11 and an adjusting bolt 16 opposed to said spring 15 adjusts inclination of the inner frame 12. Meanwhile, an electrostatic chuck plate 18 is composed of, for example, a conductive substrate such as Al and covered with an insulated dielectric layer 19 entirely upon which a sample 20 is mounted. The inner frame 12 and the end of the sample 20 being in contact with the frame 12 are pressed to be fixed by a press jig 22. On the back surface of the chuck plate 18, an electrode terminal 24 is attached, which is connected to a contact point 26 arranged at the bottom of the outer frame 11. |
