| 摘要 |
PURPOSE:To improve a precision of measurement of size and shape of an H- beam by obtaining a position and its intensity of a picture element having a max. intensity on a line or row on an optical-cut picture and an intensity of the picture elements of both neighbors, and performing a simple calculation. CONSTITUTION:Beam light or band-shaped light is irradiated to the H-beam 3. The obtained points at that time expressing light intensities IM-1, IM, IM+1 against three points CM-1, CM, CM+1 on the line or row on the optical-cut picture 4 of the H-beam are denoted as PM-1, PM, PM+1, and secondary curve passing through these three points is drawn. A position xP on the line or row giving max. value PMmax of this secondary curve can be regarded as approximate value of a true peak position XP which can be obtained by simple calculation from the equation. Thereby, the size and shape of the H-beam can be obtained highly precisely by simple calculation. |
