发明名称 SEMICONDUCTOR MEASURING DEVICE
摘要 PURPOSE:To stop the measurement when a signal value impressed to a sample element and set signal value of a power source do not coincide with each other by comparing them when a comparison start time T2 shorter than a normal test time T1 elapses after a signal is impressed by a power source part. CONSTITUTION:A signal set by a tester 2' and a signal impressed actually to the sample element 1 are given to a comparing part 6, and both values are compared with each other after the elapse of the time T2; and if they do not coincide with each other, a measured signal generating part 4' receives a reset signal from the comparing part 6 and outputs a test end signal to the tester 2' to terminate the measurement. In case that the sample element is short-circuited or opened, the measurement is stopped in the time shorter than the normal test time of the sample element, thus shortening the measurement time and improving the availability of the device.
申请公布号 JPS5979168(A) 申请公布日期 1984.05.08
申请号 JP19820188606 申请日期 1982.10.27
申请人 TOSHIBA KK 发明人 SUEDA HAJIME
分类号 G01R31/00;G01R31/26 主分类号 G01R31/00
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