发明名称 |
Exterior view examination apparatus |
摘要 |
An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with the scanning type electron microscope, the position of a surface part of the sample (mounted on the sample stage) to be observed, measured or analyzed being preliminary defined by the optical microscope, and the sample stage being moved by a certain amount thereby to bring the sample at the center of the visual field of the electron microscope.
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申请公布号 |
US4447731(A) |
申请公布日期 |
1984.05.08 |
申请号 |
US19810327191 |
申请日期 |
1981.12.03 |
申请人 |
HITACHI, LTD. |
发明人 |
KUNI, ASAHIRO;KEMBO, YUKIO;AKIYAMA, NOBUYUKI;AOKI, NOBUHIKO |
分类号 |
G01B11/02;G01B21/00;G01Q20/02;G01Q20/04;G01Q30/02;G01Q30/04;H01J37/20;H01J37/22;H01J37/28;(IPC1-7):H01J37/20 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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