发明名称 |
Apparatus for the chemical analysis of samples |
摘要 |
An apparatus for the chemical analysis of a sample ejects neutral and charged particles from the sample by ion bombardment from a primary ion source. An electric diaphragm passes only the ejected neutral particles for ioniziation in a plasma which is separate from the primary ion source and which serves only for the post-ionization of the neutral particles. The ionized particles are then analyzed by mass spectrometry. Charging of insulating samples by primary ions is prevented by rendering the diaphragm permeable to plasma electrons.
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申请公布号 |
US4447724(A) |
申请公布日期 |
1984.05.08 |
申请号 |
US19820337647 |
申请日期 |
1982.01.07 |
申请人 |
LEYBOLD HERAEUS GMBH |
发明人 |
OECHSNER, HANS |
分类号 |
G01N23/225;G01Q30/02;H01J49/16;(IPC1-7):H01J49/26;H01J49/10 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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