| 摘要 |
PURPOSE:To readily form gamma-Fe2O3 which has excellent magnetic characteristics by mixing H2O with mixture gas of Ar or the like and thermally oxidizing the obtained thin Fe3O4 magnetic film. CONSTITUTION:An Fe3O4 is formed on a substrate by using an Fe or an Fe alloy which mainly contains Fe as a target and reactively sputtering in Ar or Ar+O2 mixture gas. In this case, H2O of 0.5-1.6% is mixed as a partial pressure with the partial pressure of Ar gas in Ar or Ar+O2 mixture. Then, the obtained thin Fe3O4 magnetic film is thermally oxidized. In this manner, gamma-Fe2O3 which has excellent magnetic characteristics can be readily formed. |
