METHOD OF MANUFACTURING A SEMICONDUCTOR PHOTODETECTOR

摘要

1. A process for the manufacture of a semiconductor photodetector device comprising a network of elementary detectors constituted by mesa diodes realized in a semiconductor substrate, characterized in that it comprises the following steps : - the realization on a semiconductor substrate (1) of a junction zone on the whole surface of the substrate ; - the deposit of a protective layer (3) on the zones destined to constitute the elementary detectors ; - the engraving of grooves (4) between the preceding zones ; - the deposit by evaporation of an opaque layer (5) on the whole of the surface of the device ; - the elimination of the protective layer (3) ; - the realization of electric contacts (6) on each of the elementary detectors and on the substrate, and the connections (7) on these contacts.