| 摘要 |
PURPOSE:To carry out an X-ray diffraction measurement of a minute sample to be evaluated at high speed, by providing a two-dimensional moving mechanism which moves a sample mounting member on a plane including the sample surface such that an X-ray incident point is located at a position in a desired evaluation region. CONSTITUTION:Two-dimensional data detected by a two-dimensional optical detector 12 are passed through an A/D converter 17 and stored in a memory circuit 19. An arithmetic controller 20 detects deviations DELTAx, DELTAy of the position of the intersection of horizontal and vertical patterns, as an X-ray incident point, from the position of a minute region 23 to be evaluated, the positions having been stored in the circuit 19. The detected quantities DELTAx, DELTAy are respectively delivered from the controller 20 to a pulse motor 21 for driving a stage 10 in the X direction and a pulse motor 22 for driving the stage 10 in the Y direction in the form of pulses the numbers of which correspond to the movements of the stage 10 in the X and Y directions. Accordingly, it is possible to effect an X-ray diffraction measurement of a minute sample to be evaluated at high speed, and the diffraction data have high reliability. |
