| 摘要 |
PURPOSE:To manufacture high purity titanium nitride having small grain size and high thermal stability by reacting titanium tetrachloride with ammonia at a specified temp. under ordinary pressure, and heating the reaction product at a specified temp. in an inert gaseous atmosphere. CONSTITUTION:Titanium tetrachloride is brought into reaction with ammonia at 1,000-1,400 deg.C under ordinary pressure, and the reaction product is heated at 600-1,400 deg.C in an inert gaseous atmosphere. Hyperfine powder of titanium nitride having small grain size and a narrow grain size distribution is manufacture under ordinary pressure. The atomic ratio of N/Ti in the powder is close to the stoichiometric ratio. |
