| 摘要 |
PURPOSE:To easily obtain a sensor array of high reliability by a method wherein a sensor substrate loaded with sensor elements and blocking diodes and a terminal electrode substrate whereon a matrix wiring is formed are prepared, and both are held and coupled on the same plane by means of connection substrate. CONSTITUTION:The substrates 3-5 are made of glass, a clear electrode 9, an amorphous Si, and Ni-Cr electrodes 6 are laminated on the substrate 3, and the sensor elements 1 and the blocking diodes 2 are formed in series. Each terminal electrode is arranged at the end part of the substrate 3 at a constant pitch, thus facilitating the connection between the wiring pattern of the substrates 4. Conductor patterns on the substrates 4 are, at the end part, arranged to the same as the arrangement pitch of the terminal electrodes of the elements 1 or 2 of the substrate 3. Besides, the connection wiring pattern of the substrates 5 has the same arrangement pitch as the terminal electrodes. The terminal electrodes and the wiring patterns are matched each other by holding the substrates 3 and 4 on the same plane, the conduction plane of the substrate 5 is matched to the corresponding part of the substrates 3 and 4, which substrates are connected each other by thermocompression bonding from the back surfaces of the substrates, 5 and accordingly the array is completed. |
