| 摘要 |
PURPOSE:To facilitate detection of defective point and discovery of cause by storing coordinates of a plurality of diagnostic points in the IC and by measuring and displaying voltages of nodes through sequential irradiation of electron beam at the diagnostic points for each driving of IC with an input data. CONSTITUTION:An IC3 is scanned by electron beam, the secondary electron is detected 1-7 and stored 18, and the secondary electron picture corresponding to data is displayed 20 through a control circuit 8. At this time, a picture 29 indicates contrast, designates diagnostic point 30 and stores 13 the coordinate. A voltage of diagnostic point 30 designated by reading stored coordinate 13 is measured with an energy analyzer 2. A series of input/output data train is read in accordance with the driving sequence from the auxiliry storage 10. It is then applied step-by-step to an IC3 by the driving circuit for the purpose of diagnosis. A result is repeatedly displayed 20 as a voltage map. An abnormal point for an input data can be detected accurately by observing said map. |
