发明名称 WIRE BONDING METHOD
摘要 PURPOSE:To electrically execute junction by electrically detecting deviation of pellet position and by compensating such deviation in accordance with pre-programmed reference vector. CONSTITUTION:A X-Y board 3 which slids with a chesman 2 on an apparatus 1 and an X-Y board 6 which moves with a pulse motor 4 and is provided with a capillary 5 is provided on the board 3. A minute amount of movement of board 3 is detected. A micrometer 7 is connected to a computer 10 through a detection timing circuit 8 and an A/D conversion circuit 9. The computer 10 is previously provided with a movement program 10a, an output is converted 10b into a pulse signal through the compensating calculation by the detected signal and sepcified program 10a of meter 7. The signal thus obtained drives a pulse motor 4. The detection timing circuit 8 and the computer 10 operate with a command generated from a command generating circuit 11. The automatic line junction can be realized even without accurate positioning of pellet by the method for compensating for the reference vectors previously programmed.
申请公布号 JPS5976438(A) 申请公布日期 1984.05.01
申请号 JP19830177948 申请日期 1983.09.28
申请人 HITACHI SEISAKUSHO KK 发明人 TANIMOTO MICHIO;SAKAMOTO YUUZABUROU;FURUYA TERUO
分类号 H01L21/60 主分类号 H01L21/60
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