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发明名称
摘要
申请公布号
JPS5918875(B2)
申请公布日期
1984.05.01
申请号
JP19760045282
申请日期
1976.04.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ISHIHARA TAKESHI;KUNINOBU SHIGERO
分类号
H01L29/78;H01L21/22;H01L21/336;H01L21/76
主分类号
H01L29/78
代理机构
代理人
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