发明名称 Flexible non-extensible hinge for photomask assembly
摘要 Hinged glass photomask assemblies for photolithographic processes are disclosed wherein a flexible polymeric hinge is used in combination with a flexible, non-extensible binding strip which prevents lateral movement of the glass plates thereby providing for repeated use of the phototool without the use of registration systems such as alignment pin assemblies.
申请公布号 US4446184(A) 申请公布日期 1984.05.01
申请号 US19820355040 申请日期 1982.03.05
申请人 PPG INDUSTRIES, INC. 发明人 BOWSER, GEORGE H.
分类号 G03F1/14;H05K3/00;(IPC1-7):B32B17/06;G03B27/04 主分类号 G03F1/14
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