| 摘要 |
PURPOSE:To easily set the interval between respective masks formed to a specified value by employing the mask structure that a part of the corner of at least a sheet of mask of a plurality of flat masks formed almost rectangular is eliminated. CONSTITUTION:An almost rectangular first flat mask 31 having the reference holes 30 is placed on a box type level 33 having the reference pins with said reference pins 32 and holes 33 aligned. Then, an insulating film 35 made of polyimide film is placed on the previously half-etched area 35 of the non-effective part where the aperture 34 does not exist, and a second flat mask 38 having the reference holes 37 is also placed thereon. Finally, an upper plate 39 is placed. At this time, the substantially rectangular corner part 40 of the second mask 38 is largely removed. Thereby, the corner part is prevented from caulked condition due to concentration of strain and the mask can be formed easily. |
