| 摘要 |
PURPOSE:To produce the MR element eliminating the characteristic deterioration of MR in connection with the surface status of a substrate at low cost by a method wherein a thermosetting organic material layer, a metallic oxide layer or metallic nitride layer and a magneto-resistance effect film are successively formed on the surface of a substrate. CONSTITUTION:An insulating material layer 2 made of SiO2 etc. to avoid magnetic or electric connection with an MR film 5 is formed on a substrate 1 made of ferrite etc. by sputtering and the surface of the layer 2 is coated with the solution of the thermosetting organic material by spin coating to form a thermosetting organic layer 3. Besides a metallic oxide layer 4 made of SiO2 etc. is formed by evaporation etc. and then an MR film 5 is formed by sputtering to complete an MR element 8. In such a constitution, the metallic oxide layer 4 may be formed with relatively larger grain size corresponding to the temperature of the substrate 1 in case of forming the MR film 5 as well as provided with the performances exactly similar to those of the MR film formed on the conventional fine mirror finished substrate while the characteristics of the MR element 8 may be prevented from deteriorating since any residual oxygen, water and hydroxyl group etc. contained in the thermosetting organic material layer 3 are diffused into the MR film 5. |
