| 摘要 |
PURPOSE:To execute attraction by electrostatic force of excellent reliability by setting up an electrode of one polarity so as to surround an electrode of the other polarity. CONSTITUTION:A wafer 1 is placed on the upper surfaces of electrodes 2, 3 using an alloy mainly comprising Al as a material. Thin-film insulating layers 2a, 3a in thickness of approximately several mum-30mum are formed on the surfaces of these electrodes 2, 3 through oxidation treatment. The electrode 3 takes an annular discoid shape, the electrode 2 takes a discoid shape, and both are insulated electrically, and fixed concentrically on a base 4 as an insulator through a separating section as an annular clearance so that the electrode 3 surrounds the periphery of the electrode 2. |
