| 摘要 |
PURPOSE:To evacuate a vacuum tank quickly and continuously by coupling a cryo-pump having no active carbon panel and a discharge type high-vacuum pump having an auxiliary pump to the vacuum pump through piping. CONSTITUTION:A cryo-pump 2 having no active carbon panel is coupled through a two-way valve 3a and piping 4 to a vacuum tank 1 while a discharge type high-vacuum pump 5 is coupled through a two-way valve 3b and another piping 6. Furthermore an auxiliary pump 7 is coupled in series to said pump 5 through a two-way valve 3c. Cryo-pump 2 will discharge only chandensable gas such as H2O, CO2, O2, N2 while high-vacuum pump 5 will discharge non-condensable gas such as H2, He. Consequently H2 can be discharged continuously even under saturated state of cryo-pump 2. |
