发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To cause a larger current to flow and to obtain a larger charge capacity, by laminating alternately a P-layer and an N-layer, and connecting all the P-layers and all the N-layers in each circuit respectively, which are provided with each electrode independently. CONSTITUTION:An N-type Si layer 21 and a P-type Si layer 22 are alternately laminated, and the both sides are subjected to a mesa etching whereby a trape zoid is formed. By a lithography, a protection film 41 having a window is made on the left side surface of the trapezoid. Applying the mask 41, an N-diffusion layer 2 is made. By eliminating the mask 41, a diffusion mask 51 is provided on the right side surface to make a P-layer 3. The mask 51 is eliminated and a metal is vapor deposited to make electrodes 5 and 6. The area of a P-N junction increases, so that a diode for large current or a capacitor of large capacity can be obtained.
申请公布号 JPS62117375(A) 申请公布日期 1987.05.28
申请号 JP19850258196 申请日期 1985.11.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKANISHI MASAHIKO
分类号 H01L27/04;H01L21/822;H01L29/861 主分类号 H01L27/04
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