| 摘要 |
PURPOSE:To inspect the defect in a configuration accurately in real time, by projecting parallel light rays on a liquid crystal display panel, on which the image of an object is displayed, converging the transmitted light rays by a lens, forming a Fourier transformation image corresponding to the object on a filter, on which the negative of a good Fourier transformation image is recorded, thereby detecting the amount of light transmitted through a filter. CONSTITUTION:Parallel light rays are projected on a liquid crystal display panel 7, on which an image 1' corresponding to an object 1 is displayed. The transmitted light rays are converged by a Fourier transformation lens 8, and the Fourier transformation image is formed on a focal point, i.e., a filter 9. When the configuration of the object 1 is changed, the amount of the transmitted light is changed, and the different Fourier transformation image is obtained. When the object 1 is a defective product, the light is transmitted through the filter 9 and inputted to a photodiode 10. Then, an output is generated from the photodiode 10. By detecting the level of the output of the photodiode 10, the defect in the configuration of the object 1 can be detected. |
