| 摘要 |
PURPOSE:To miniaturize a laser equipment and improve its total effeciency by arranging discharge pipes in two lines and by making discharge pipes shift in position from the center shaft corresponding to discharge mouths of blowers. CONSTITUTION:Four discharge pipes 1a and 1b at one side and 2a and 2b at the other side are arrayed in two lines. In discharge pipes, gas increasing in temperature through discharging is circulated by the corresponding 1st centrifugal blower 6a or 2nd centrifugal blower 6b and then cooled by 1st heat exchanger 7a or 2nd heat exchanger 7b. Two blowers 6a and 6b are arranged facing each other and discharge mouths 10 of 1st blower 6a and 2nd blower 6b are connected to insulating cylinders 9a and 9b respectively and separately. In addition, since discharge mouth 10 shift from center shafts 11 of blowers respectively, 1st and 2nd blowers can be arranged, facing each other, between two columns of discharge pipes, and the positions of discharge pipes are made to shift from center shafts and to correspond to shifts of discharge mouths. Consequently, the equipment can be miniaturized and the total efficiency of it can be also improved. |
