| 摘要 |
PURPOSE:To take a measurement easily even at a narrow part by reflecting light projected from a polished side to a plane to be meaured, and observing the reflected light from a side where a fiber is separated. CONSTITUTION:The surface 3 to be measured is irradiated with the incident light 4 through an incidence fiber 1 and its reflected light is detected by a reflection fiber 2. At this time, the light emitted from the incidence fiber 1 has a cross section equal to a core diameter (d), but has a radiation angle (a), so the size D and center position L of the reflected image very with the distance G and inclination theta between the surface 3 to be measured and a fiber tip. Then, geometric relation is born among those values (d), (a), G, theta, D, and L, so (d) and (a) are given and D and L are measured to find G and theta. |
