| 摘要 |
PURPOSE:To obtain a magnetic sensor which can create a wide magneto-electric conversion range and a phase/displacement detector applying it by arranging a magnetic field generation means adapted to form a magnetic field almost vertical to the film surface of a ferromagnetic thin film magneto-electric conversion element. CONSTITUTION:A permanent magnet 3 for biasing is provided to generate a magnetic field almost vertical to the film surface of a ferro magnetic thin film resistance element 1 formed on a substrate 2. The sensor thus obtained is used and a magnetic material 5 is arranged as an object to be detected as illustrated by drawings A and B, where the intensities of magnetic fields are HB1X and HB2X. These values are obtained in the direction (x) of magnetic fields HB1 and HB2 working on the sensor. But at the drawing A, as the magnetic field HB1 is vertical to the thin film, the value HB1X is 0. At the drawing B, where the object being detected is moved, the magnetic path working on the sensor is tilted by the object being detected to produce a magnetic field HB2 resulting in the value HB2X by vector resolution. In other words, variation in the resistance value of the magnetic sensor is very large due to the magnetic field sensing direction characteristic of a ferromagnetic thin film. |
