PROBE DETECTOR OF SEMICONDUCTOR LASER

摘要

PURPOSE:To save the time for detecting characteristics without deteriorating laser chips at all and to improve the yield of detecting processes by a method wherein a current impressing means is provided on the semiconductor laser chips laid between a measuring holder and a vacuum pointer. CONSTITUTION:The ends of laser chips 1 are made in parallel with the reference surace of a measuring holder 7. Next the laser chips 1 are attracted to a vacuum needle 6 and a chip holder 5 is laterally moved so that the measuring holder 7 may be located below the vacuum needle 6. Then the vacuum needle 6 is lowered to place the laser chips 1 attracted to the vacuum needle 6 on the measuring holder 7 making the laser chip ends align with the reference surface of said holder 7. Utilizing the vacuum needle 6 coming into contact with the chips 1 as an electrode, said vacuum needle 6 and said holder 7 are impressed with a voltage to supply the chips 1 with a current. The light emitted from the chips 1 may be detected by an optical output detector 8 while the various characteristics such as current-voltage characteristic, current-optical output characteristic and patterns may be displayed on an oscilloscope 9.