发明名称 ELECTRODE HOLDER OF EXTERNALLY HEATING TYPE PLASMA CHEMICAL VAPOR GROWTH DEVICE
摘要 PURPOSE:To provide a titled device with which abnormal electric discharge and the short circuiting in electrode holding parts are difficult to arise by the constitution wherein electrodes are held by holding bars longer than the spacing between the electrodes and the pipes for preventing short circuiting covering the outside circumference of the connecting bars between the electrode holding bars and connecting plates are provided. CONSTITUTION:Parallel conductor bars 15 are mounted at the ends of a pair of connecting plates 9, 9 which are heat resistant insulators of a semicircular shape; further two sets of connecting bars 10, 11 which are heat resistant insulators in parallel with said bars are mounted thereby constituting an electrode holder. Electrodes 18 mounted with a base plate are inserted and held into the notches provided at the front ends of electrode holding bars 12 of heat resistant insulators mounted to said bars 10, 11 and the bars 12 are constituted longer than the spacing between the electrodes 18. The electrodes 18 are connected alternately to the bars 15 by means of connecting bars 16. Pipes 14 for preventing short circuiting which cover the outside circumferences of the bars 10, 11 between connecting plates 9 and the bars 12 apart from each other are provided to permit easy attaching and detaching of the electrodes 18. Abnormal discharge from the parts except the electrodes 8 and the short circuiting by the vapor grown films on the bars 10, 11 are prevented.
申请公布号 JPS5969141(A) 申请公布日期 1984.04.19
申请号 JP19820178763 申请日期 1982.10.12
申请人 KOKUSAI DENKI KK 发明人 MIYA HIRONOBU
分类号 H01J37/32;C23C16/50;C23C16/509 主分类号 H01J37/32
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