| 摘要 |
<p>PURPOSE:To contrive to increase the output component of each picture element by a method wherein layers of semi-convex lens form are formed on the upper layer or the lower layer of a color filter provided on a photosensitive picture element of a solid-state image pick-up element by photoetching method. CONSTITUTION:After a transparent organic layer 9 is coat-formed on the solid- state image pick-up element 1 and pre-baked, excess exposure is performed by using proximity exposure by means of a mask 10. After development and rinse, flow is formed in a resist by treatment at a higher temperature than a designated post bake termperature of the resist, and accordingly the layers 11-16 of semi-convex lens form are formed on the photosensitive picture elements 3-8. Next, according to a fixed treatment, yellow dyed layers 19 and 20 are formed larger than the picture elements 4 and 7 by covering the lens form layers 12 and 15 over the entire surfaces, cyane dyed layers 24 and 25 are formed larger than the picture elements 5 and 8 by covering the lens form layers 13 and 16, and the part except Al pads 2 is covered with a protection film 26. By this constitution, the lights reflected in the periphery of the photosensitive picture elements are collected to the picture elements by lens effect, and then the solid-state image pick-up device with a high sensitivity color filter can be obtained.</p> |
