| 摘要 |
PURPOSE:To measure easily and accurately the lattice constant of each growth layers by providing solution receptor parts of a solution receptors traveler so as to make their dimensions small in order, and laminating the stepped growth layers in order on a substrate so as to be exposed. CONSTITUTION:Hollows 22 for seating a substrate are provided on a substrate holder 21 and a solution receptors traveler 24 is arranged. On the traveler 24 the liquid receptors 25a, 25b, 25c are provided, and formed so as to make the widths of the bottomless shape narrow in order of the position from the front to the rear. A substrate 23 is seated on the hollows 22, and solutions of each materials for a back layer 41, an active layer 42, and a top layer 43 are filled in the recepters 25a, 25b, and 25c. This growth device is brought in a hydrogen atmosphere of a reacter and heated, and the traveler is transferred in the direction A. By this method, the back layer 41, active layer 42 and top layer 43 are formed on the substrate 23 so as to be exposed stepwise. |
