摘要 |
PURPOSE:To improve the durability and prevent the peelability or the like even in caes of the repeated use, by forming a preparing vessel with a sintered material consisting essentially of silicon carbide, silicon nitride, or sialon. CONSTITUTION:When the preparing vessel consists essentially of silicon carbide, it is sintered by the pressure sintering method, or an easy sintering powder is produced by the raw material powder method and a sintering auxiliary is added to sinter it by the normal-pressure sintering method. When the preparing vessel consists essentially of silicon nitride, MgO, Mg3Nz, or the like is added as an auxiliary improving sintering efficiency. When the preparing vessel consists essentially of sialon, one or more of Mg, Ca, Y, Nd, and Er and combined as M of Mx (M is a metal having an electronegativity of 1.0-1.2 and x<=2) and are sintered by heating. |