发明名称 EXPOSING DEVICE
摘要 <p>PURPOSE:To execute the exposing with a correct exposing quantity by opening a shutter and executing the exposing after detecting that the illuminance of a light source is stable to the extent that the transient overshooting, ringing, etc., accompanying the illuminance increase can be neglected. CONSTITUTION:An exposing control CPU 9 issues the illuminance increase command to an illuminance control part 2, and then, the illuminance control part 2 increases the illuminance of a light source LP. The exposing control CPU 9 fetches the illuminance data with a certain sampling timing, the illuminance data in the prescribed number of times of sampling all enter a constant tolerance, and then, it is decided that the transient overshooting, ringing, etc., of the illuminance at the time of the illuminance increase of the light source LP are converged and stabilized. When the exposing control CPU 9 outputs a shutter releasing command to a shutter control part 4, the shutter control part 4 commands the effect to a driving circuit 3 and the driving circuit 3 releases a shutter ST.</p>
申请公布号 JPS62125359(A) 申请公布日期 1987.06.06
申请号 JP19850265110 申请日期 1985.11.27
申请人 CANON INC 发明人 YUI TAKASUMI
分类号 G03B27/72;G03F1/00;G03F1/76;G03F7/20;H01L21/027;H01L21/30 主分类号 G03B27/72
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