| 摘要 |
PURPOSE:To enable simultaneous detection of a pressure compensated for temperature and a temperature from an output of a silicon element by supplying an output of a piezo-electric vibrator to a temperature compensation circuit in a composite sensor unit comprising the piezo-electric vibrator and the silicon pressure sensor. CONSTITUTION:A composite sensor 2 is made up of a piezo-electric vibrator 3 and a silicon element 4 stuck together. When a fixed pressure distortion is applied to the piezo-electric vibrator 3, an alternate current of the frequency f0 the same as the vibration frequency of the piezo-electric vibrator 3 is detected from the output end of the silicon element 4. Outputs at output ends 2 and 4 of the composite sensor 2 are supplied to a temperature compensation circuit 6 through a detector 5 and a temerature compensation signal is supplied to the temperature compensation circuit 6 with the temperature detection output from the vibrator 3 as comparison reference voltage. The output of the compensation circuit 6 is amplified with an amplifier 7 and outputted into a pressure display section 8. An output voltage of the composite sensor 2 is the function of the temperature and applied to a temperature display section 12. No change appears in the output voltage of the pressure display section 8 even when the output voltage changes due to a temperature variation because the pressure is constant. Thus, the temperature compensation is accomplished as expected. |
