| 摘要 |
PURPOSE:To remove a sliding part from a setter and to obtain a contactless setter with superior precision while improving the durability and linearity by using an up/down counter and a D/A converter in combination. CONSTITUTION:The contactless setter is provided with a clock pulse oscillator 11 whose frequency is adjusted and AND gate circuits 13 and 14 which inputs an up signal (u) and a down signal (d) to pass and cut off clock pulses from the oscillator 11. Further, the up/down counter 12 counts up by clock pulses from the circuit 13 and counts down by clock pulses from the circuit 14. Then, an initializing circuit 20 and a preset value setting part 21 are connected to this counter 12. Then, a converter 17 outputs a desired set value; the sliding part of the setter is removed to improve the durability and linearity. |
