| 摘要 |
PURPOSE:To improve the oscillation efficiency of a gas laser device by connecting a cylindrical electrode between the end of a supporting cylinder having a gas exhaust at the peripheral body and a gas exhaust side tube end of a laser tube, thereby absorbing the heat energy of the high temperature gas exhausted from the tube by the cylindrical electrode. CONSTITUTION:When gas becoming high temperature due to the discharge in a laser tube 11 passes in a cylindrical electrode 10, part of the heat energy is removed by the electrode 10 to be utilized as the energy of the laser oscillation, thereby improving the oscillation efficiency. This effect is particularly remarkable when a blower 13 having the capacity of 500l/min or larger of flow rate in the operation gas pressure is used. When the ratio D'/D of the inner diameter D' of the electrode 10 to the inner diameter D of the tube 11 is set to a range of 0.8-2, and then the length L of the electrode 10 is set to 30mm. or longer, remarkably effect can be obtained. |
