发明名称 PLASMA X RAY SOURCE
摘要 PURPOSE:To improve dielectric strength and to increase the amount of X rays that can be taken out, by providing intermediate electrodes, which have through holes that agree with the through hole of an insulator, at the intermediate part of the insulator, and a means, which applies the voltages that are obtained by dividing a discharge voltage to be applied across electrodes to the intermediate electrodes. CONSTITUTION:Two intermediate electrodes 6 and 7, which have through holes whose center agrees with that of the through hole of an insulator 1, are provided at the intermediate part of the insulator 1, with an interval being provided. Voltages, which are obtained by dividing the voltage across electrodes 2 and 3 by resistors r1-r3, are applied to the intermediate electrodes 6 and 7. A trigger signal T is supplied to one intermediate electrode 6 from a trigger circuit. Since the voltages obtained by dividing the voltage across the electrodes 2 and 3 are applied to the intermediate electrodes 6 and 7, respectively, electric field inclination in a capillary becomes uniform. The part, wherein the electric field is concentrated or becomes unstable, does not exist. Therefore, the dielectric strength between the electrodes 2 and 3 becomes very high in comparison with a device, wherein divided voltages are not applied to intermediate electrodes.
申请公布号 JPS5966118(A) 申请公布日期 1984.04.14
申请号 JP19820177278 申请日期 1982.10.08
申请人 NIPPON DENSHI KK 发明人 OOTA SUSUMU
分类号 H01J35/22;G03F7/20;H01L21/027 主分类号 H01J35/22
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