发明名称 PLASMA X RAY SOURCE
摘要 PURPOSE:To start the discharge at a constant voltage all the time, by providing intermediate electrodes, which have through holes that agree with the through hole of an insulator, at the intermediate part of the insulator, and providing a means, which applies a trigger voltage to one intermediate electrode. CONSTITUTION:Two intermediate electrodes 6 and 7, which have through holes that agree with a capillary, are provided at the intermediate part of an insulator 1, with an interval being provided. Voltages, which are obtained by dividing the voltage across electrodes 2 and 3 by resistors r1-r3, are applied to the intermediate electrodes 6 and 7. A trigger signal T is supplied to one intermediate electrode 6 from a trigger circuit. When a capacitor Cd is charged to a certain constant voltage, at which surface discharge is not started, and the trigger T is applied, the electric field in the capillary is rapidly changed by the signal. The main discharge between the electrodes 2 and 3 is started accordingly. Since the discharge can be started at the constant voltage all the time, the amount of the generated X rays becomes constant every time.
申请公布号 JPS5966119(A) 申请公布日期 1984.04.14
申请号 JP19820177279 申请日期 1982.10.08
申请人 NIPPON DENSHI KK 发明人 OOTA SUSUMU
分类号 H01J35/22;G03F7/20;H01L21/027 主分类号 H01J35/22
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