PARALLEL TWO-WIRE TYPE WAVEGUIDE

摘要

PURPOSE:To attain effective plasma heating by regulating a value W/a to a specific value, in a parallel two-wire type waveguide comprising two conductor plates having W width and a square wavegide having (a) width surrounding the plates. CONSTITUTION:The conductor plates 1a, 1b having W width are formed in parallel and placed at the center of the square waveguide 2 having (a) width and 2b height, and the distance is 2h. In heating plasma, a value P/P is decreased by regulating the W/a to 0.7-0.8, where P is the X axis component of the total power in the cross section and P is the Y axis component of it, allowing to attain effective plasma heating.