| 摘要 |
PURPOSE:To perform the control of the humidity which gives no disturbance to a temperature control system, by using the target set value that is given to a temperature controller in an ultraslow temperature control system to a dry temperature and calculating the set value of a dew point to perform the relative humidity control. CONSTITUTION:An ultraslow temperature control system comprises a set value extracting circuit 13 which delivers the set value corresponding to the control mode, a dry temperature detector 1, a humidity controller 10, a control valve 11, and a temperature controller 12 consisting of an air cooler for cooling purpose and a heater for heating purpose. Furthermore this temperature control system controls the relative humidity. For this humidity control, the 1st operator 14 calculates the dry saturation vapor pressure which defines the set temperature obtained through the circuit 13 as a dry temperature, and the 2nd operator 16 calculates the dew point saturation vapor pressure from said dry saturation vapor pressure and the set value of a relative humidity setter 15. Then the dew point set value is calculated 17. This dew point set value and the output given from a dew point detector 2 are applied to a dew point controller 18. The output of the controller 18 actuates a humidifier 7 to keep the humidity at a constant level. |
