PHOTO-ASSISTED CHEMICAL EVAPORATION DEPOSITION,申请号JP19830081593-传众专利搜索

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发明名称	PHOTO-ASSISTED CHEMICAL EVAPORATION DEPOSITION
摘要
申请公布号	JPS5964770(A)	申请公布日期	1984.04.12
申请号	JP19830081593	申请日期	1983.05.10
申请人	ENERGY CONVERSION DEVICES INC	发明人	DEEBITSUDO DEII OORURETSUDO;RII UORUTAA;JIYAIMU EMU REIESU;SUTANFUOODO AARU OBUSHINSUKII
分类号	C23C16/04;C23C16/48;G03G5/08	主分类号	C23C16/04
代理机构		代理人
主权项
地址

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