| 摘要 |
PURPOSE:To improve the positional accuracy of a spring-supported stage such as an X-Y-axes stage, by coupling fixed and movable members to each other through springs and alternately providing cut lines in the fixed and the variable members. CONSTITUTION:When an external force P acts to an upper member 16 as shown by an arrow, the upper member is deflected about a lower member 13 as a fulcrum in the direction of the action of the external force to springs 28a, 28b, 29a, 29b so that the upper member is displaced in the direction of the action of the external force depending on its magnitude. At the same time, the external force P also acts to the lower member 13 to deflect it about a first and a third upper member 15, 17 as fulcra to displace the lower member as shown by an arrow. The first and the third upper members 15, 17 are deflected and displaced about a first and a third lower members 12, 14 as fulcra in the direction of the action of the external force of springs 20a, 20b, 21a, 21b, 36a, 36b, 37a, 37b. |
