| 摘要 |
PURPOSE:To obtain an electrophotographic receptor having excellent electrostatic charging characteristic, dark attenuation characteristic and photosensitive characteristic by forming the 1st and 2nd hydrogenated amorphous silicon oxide films by using the glow discharge of a gaseous mixture of oxygen and gas contg. silicon on a conductive substrate, and forming an intermediate hydrogenated amorphous silicon film by using the glow discharge of gas contg. silicon forming the 1st and 2nd hydrogenated amorphous silicon oxide films. CONSTITUTION:An Al drum substrate 13 is maintained at 250 deg.C in a chamber 2, and the gaseous mixture contg. >=0.5% oxygen based on flow rate with respect to gaseous silane and having 50SCCM flow rate of gaseous silane is converted to plasma by glow dischage, whereby the 1st hydrogenated amorphous silicon oxide film 19 is formed on the substrate 12. The inflow of only the oxygen is then stopped, and a hydrogenated amorphous silicon film 20 is formed on the film 19; thereafter, the 2nd hydrogenated amorphous silicon film 21 is formed on the film 20 under the same conditions as the initial conditions. The films 19, 21 have a function for blocking the injection of electric charge and the film 20 has a function of generating electric charge. |
