| 摘要 |
PURPOSE:To enable the defect detection on the surface of a specimen and to attain to enhance analytical accuracy, by moving the specimen while removing data exceeding a set change range. CONSTITUTION:A specimen is stopped at (n) analytical positions each while succeedingly moved and plural times of high voltage pulses are applied between a spark electrode 4 and the specimen 2 by a light emitting control apparatus 4 at each analytical position. Light currents outputted from each optical electron multiplier 6 by plural times of spark discharges are respectively integrated by an integrator 7 to be stored in a memory element 11 through an analogue multiplexer 8, an A/D converter 9 and CPU10. In this case, the average value of (n) data each showing the line intensity of each element is calculated by CPU10 and multiplied by the coefficient % set at each element and stored in the memory element 11 to calculate the upper and the lower limit values of the line intensity of each element while data out of this upper and lower limit range is removed as the data of a defect site. |
